5/18/2012	4:49:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/18/2012	4:49:46 PM	Recipe started at 4:49 PM
5/18/2012	4:49:46 PM	Helium valve closed
5/18/2012	4:49:46 PM	H2 valve closed
5/18/2012	4:49:46 PM	BCl3 valve closed
5/18/2012	4:49:46 PM	PH3 valve closed
5/18/2012	4:49:46 PM	SiCl4 pre valve closed
5/18/2012	4:49:46 PM	SiCl4 post valve closed
5/18/2012	4:49:46 PM	Main Vac valve closed
5/18/2012	4:49:46 PM	Bypass valve closed
5/18/2012	4:49:46 PM	Bubbler valve closed
5/18/2012	4:49:46 PM	Helium MFC set to  0.000000
5/18/2012	4:49:46 PM	H2 MFC set to  0.000000
5/18/2012	4:49:46 PM	BCl3 MFC set to  0.000000
5/18/2012	4:49:46 PM	PH3 MFC set to  0.000000
5/18/2012	4:49:46 PM	SiCl4 MFC set to  0.000000
5/18/2012	4:49:46 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	4:49:46 PM	Tube furnace set to 0
5/18/2012	4:49:47 PM	Run finished at 4:49 PM
5/18/2012	4:49:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/18/2012	4:49:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2012	4:49:58 PM	Recipe started at 4:49 PM
5/18/2012	4:49:58 PM	Helium valve closed
5/18/2012	4:49:58 PM	H2 valve closed
5/18/2012	4:49:58 PM	BCl3 valve closed
5/18/2012	4:49:58 PM	PH3 valve closed
5/18/2012	4:49:58 PM	SiCl4 pre valve closed
5/18/2012	4:49:58 PM	SiCl4 post valve closed
5/18/2012	4:49:58 PM	Main Vac valve closed
5/18/2012	4:49:58 PM	Bypass valve closed
5/18/2012	4:49:58 PM	Bubbler valve closed
5/18/2012	4:49:58 PM	Helium MFC set to  0.000000
5/18/2012	4:49:58 PM	H2 MFC set to  0.000000
5/18/2012	4:49:58 PM	BCl3 MFC set to  0.000000
5/18/2012	4:49:58 PM	PH3 MFC set to  0.000000
5/18/2012	4:49:58 PM	SiCl4 MFC set to  0.000000
5/18/2012	4:49:58 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	4:49:58 PM	Tube furnace set to 0
5/18/2012	4:50:01 PM	H2 valve closed
5/18/2012	4:50:01 PM	BCl3 valve closed
5/18/2012	4:50:01 PM	PH3 valve closed
5/18/2012	4:50:01 PM	SiCl4 pre valve closed
5/18/2012	4:50:01 PM	SiCl4 post valve closed
5/18/2012	4:50:01 PM	Main Vac valve closed
5/18/2012	4:50:01 PM	Bypass valve closed
5/18/2012	4:50:01 PM	Bubbler valve closed
5/18/2012	4:50:01 PM	Helium valve opened
5/18/2012	4:50:01 PM	Helium MFC set to  500.000000
5/18/2012	4:50:01 PM	H2 MFC set to  0.000000
5/18/2012	4:50:01 PM	BCl3 MFC set to  0.000000
5/18/2012	4:50:01 PM	PH3 MFC set to  0.000000
5/18/2012	4:50:01 PM	SiCl4 MFC set to  0.000000
5/18/2012	4:50:01 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	4:50:01 PM	Tube furnace set to 0
5/18/2012	4:51:14 PM	Helium valve closed
5/18/2012	4:51:14 PM	H2 valve closed
5/18/2012	4:51:14 PM	BCl3 valve closed
5/18/2012	4:51:14 PM	PH3 valve closed
5/18/2012	4:51:14 PM	SiCl4 pre valve closed
5/18/2012	4:51:14 PM	SiCl4 post valve closed
5/18/2012	4:51:14 PM	Main Vac valve closed
5/18/2012	4:51:14 PM	Bypass valve closed
5/18/2012	4:51:14 PM	Bubbler valve closed
5/18/2012	4:51:14 PM	Helium MFC set to  0.000000
5/18/2012	4:51:14 PM	H2 MFC set to  0.000000
5/18/2012	4:51:14 PM	BCl3 MFC set to  0.000000
5/18/2012	4:51:14 PM	PH3 MFC set to  0.000000
5/18/2012	4:51:14 PM	SiCl4 MFC set to  0.000000
5/18/2012	4:51:14 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	4:51:14 PM	Tube furnace set to 0
5/18/2012	4:51:15 PM	Run finished at 4:51 PM
5/18/2012	4:51:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2012	4:54:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2012	4:54:35 PM	Recipe started at 4:54 PM
5/18/2012	4:54:35 PM	Helium valve closed
5/18/2012	4:54:35 PM	H2 valve closed
5/18/2012	4:54:35 PM	BCl3 valve closed
5/18/2012	4:54:35 PM	PH3 valve closed
5/18/2012	4:54:35 PM	SiCl4 pre valve closed
5/18/2012	4:54:35 PM	SiCl4 post valve closed
5/18/2012	4:54:35 PM	Main Vac valve closed
5/18/2012	4:54:35 PM	Bubbler valve closed
5/18/2012	4:54:35 PM	Bypass valve opened
5/18/2012	4:54:35 PM	Helium MFC set to  0.000000
5/18/2012	4:54:35 PM	H2 MFC set to  0.000000
5/18/2012	4:54:35 PM	BCl3 MFC set to  0.000000
5/18/2012	4:54:35 PM	PH3 MFC set to  0.000000
5/18/2012	4:54:35 PM	SiCl4 MFC set to  0.000000
5/18/2012	4:54:35 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	4:54:35 PM	Tube furnace set to 0
5/18/2012	4:55:42 PM	Helium valve closed
5/18/2012	4:55:42 PM	H2 valve closed
5/18/2012	4:55:42 PM	BCl3 valve closed
5/18/2012	4:55:42 PM	PH3 valve closed
5/18/2012	4:55:43 PM	SiCl4 pre valve closed
5/18/2012	4:55:43 PM	SiCl4 post valve closed
5/18/2012	4:55:43 PM	Main Vac valve closed
5/18/2012	4:55:43 PM	Bubbler valve closed
5/18/2012	4:55:43 PM	Bypass valve opened
5/18/2012	4:55:43 PM	Helium MFC set to  0.000000
5/18/2012	4:55:43 PM	H2 MFC set to  0.000000
5/18/2012	4:55:43 PM	BCl3 MFC set to  0.000000
5/18/2012	4:55:43 PM	PH3 MFC set to  0.000000
5/18/2012	4:55:43 PM	SiCl4 MFC set to  0.000000
5/18/2012	4:55:43 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	4:55:43 PM	Tube furnace set to 0
5/18/2012	4:56:43 PM	Helium valve closed
5/18/2012	4:56:43 PM	H2 valve closed
5/18/2012	4:56:43 PM	BCl3 valve closed
5/18/2012	4:56:43 PM	PH3 valve closed
5/18/2012	4:56:43 PM	SiCl4 pre valve closed
5/18/2012	4:56:43 PM	SiCl4 post valve closed
5/18/2012	4:56:43 PM	Bypass valve closed
5/18/2012	4:56:43 PM	Bubbler valve closed
5/18/2012	4:56:43 PM	Main Vac valve opened
5/18/2012	4:56:43 PM	Helium MFC set to  0.000000
5/18/2012	4:56:43 PM	H2 MFC set to  0.000000
5/18/2012	4:56:43 PM	BCl3 MFC set to  0.000000
5/18/2012	4:56:43 PM	PH3 MFC set to  0.000000
5/18/2012	4:56:43 PM	SiCl4 MFC set to  0.000000
5/18/2012	4:56:43 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	4:56:43 PM	Tube furnace set to 0
5/18/2012	4:56:44 PM	Run finished at 4:56 PM
5/18/2012	4:56:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2012	6:52:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2012	6:52:30 PM	Recipe started at 6:52 PM
5/18/2012	6:52:30 PM	Helium valve closed
5/18/2012	6:52:30 PM	H2 valve closed
5/18/2012	6:52:30 PM	BCl3 valve closed
5/18/2012	6:52:30 PM	PH3 valve closed
5/18/2012	6:52:30 PM	SiCl4 pre valve closed
5/18/2012	6:52:30 PM	SiCl4 post valve closed
5/18/2012	6:52:30 PM	Main Vac valve closed
5/18/2012	6:52:30 PM	Bypass valve closed
5/18/2012	6:52:30 PM	Bubbler valve closed
5/18/2012	6:52:30 PM	Helium MFC set to  0.000000
5/18/2012	6:52:30 PM	H2 MFC set to  0.000000
5/18/2012	6:52:30 PM	BCl3 MFC set to  0.000000
5/18/2012	6:52:30 PM	PH3 MFC set to  0.000000
5/18/2012	6:52:30 PM	SiCl4 MFC set to  0.000000
5/18/2012	6:52:30 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	6:52:30 PM	Tube furnace set to 0
5/18/2012	6:52:33 PM	H2 valve closed
5/18/2012	6:52:33 PM	BCl3 valve closed
5/18/2012	6:52:33 PM	PH3 valve closed
5/18/2012	6:52:33 PM	SiCl4 pre valve closed
5/18/2012	6:52:33 PM	SiCl4 post valve closed
5/18/2012	6:52:33 PM	Main Vac valve closed
5/18/2012	6:52:33 PM	Bypass valve closed
5/18/2012	6:52:33 PM	Bubbler valve closed
5/18/2012	6:52:33 PM	Helium valve opened
5/18/2012	6:52:33 PM	Helium MFC set to  500.000000
5/18/2012	6:52:33 PM	H2 MFC set to  0.000000
5/18/2012	6:52:33 PM	BCl3 MFC set to  0.000000
5/18/2012	6:52:33 PM	PH3 MFC set to  0.000000
5/18/2012	6:52:33 PM	SiCl4 MFC set to  0.000000
5/18/2012	6:52:33 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	6:52:33 PM	Tube furnace set to 0
5/18/2012	6:53:47 PM	Helium valve closed
5/18/2012	6:53:47 PM	H2 valve closed
5/18/2012	6:53:47 PM	BCl3 valve closed
5/18/2012	6:53:47 PM	PH3 valve closed
5/18/2012	6:53:47 PM	SiCl4 pre valve closed
5/18/2012	6:53:47 PM	SiCl4 post valve closed
5/18/2012	6:53:47 PM	Main Vac valve closed
5/18/2012	6:53:47 PM	Bypass valve closed
5/18/2012	6:53:47 PM	Bubbler valve closed
5/18/2012	6:53:47 PM	Helium MFC set to  0.000000
5/18/2012	6:53:47 PM	H2 MFC set to  0.000000
5/18/2012	6:53:47 PM	BCl3 MFC set to  0.000000
5/18/2012	6:53:47 PM	PH3 MFC set to  0.000000
5/18/2012	6:53:47 PM	SiCl4 MFC set to  0.000000
5/18/2012	6:53:47 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	6:53:47 PM	Tube furnace set to 0
5/18/2012	6:53:48 PM	Run finished at 6:53 PM
5/18/2012	6:53:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2012	6:55:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2012	6:55:12 PM	Recipe started at 6:55 PM
5/18/2012	6:55:12 PM	Helium valve closed
5/18/2012	6:55:12 PM	H2 valve closed
5/18/2012	6:55:12 PM	BCl3 valve closed
5/18/2012	6:55:12 PM	PH3 valve closed
5/18/2012	6:55:12 PM	SiCl4 pre valve closed
5/18/2012	6:55:12 PM	SiCl4 post valve closed
5/18/2012	6:55:12 PM	Main Vac valve closed
5/18/2012	6:55:12 PM	Bubbler valve closed
5/18/2012	6:55:12 PM	Bypass valve opened
5/18/2012	6:55:12 PM	Helium MFC set to  0.000000
5/18/2012	6:55:12 PM	H2 MFC set to  0.000000
5/18/2012	6:55:12 PM	BCl3 MFC set to  0.000000
5/18/2012	6:55:12 PM	PH3 MFC set to  0.000000
5/18/2012	6:55:12 PM	SiCl4 MFC set to  0.000000
5/18/2012	6:55:12 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	6:55:12 PM	Tube furnace set to 0
5/18/2012	6:56:17 PM	Helium valve closed
5/18/2012	6:56:17 PM	H2 valve closed
5/18/2012	6:56:17 PM	BCl3 valve closed
5/18/2012	6:56:17 PM	PH3 valve closed
5/18/2012	6:56:17 PM	SiCl4 pre valve closed
5/18/2012	6:56:17 PM	SiCl4 post valve closed
5/18/2012	6:56:17 PM	Main Vac valve closed
5/18/2012	6:56:17 PM	Bubbler valve closed
5/18/2012	6:56:17 PM	Bypass valve opened
5/18/2012	6:56:17 PM	Helium MFC set to  0.000000
5/18/2012	6:56:17 PM	H2 MFC set to  0.000000
5/18/2012	6:56:17 PM	BCl3 MFC set to  0.000000
5/18/2012	6:56:17 PM	PH3 MFC set to  0.000000
5/18/2012	6:56:17 PM	SiCl4 MFC set to  0.000000
5/18/2012	6:56:17 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	6:56:17 PM	Tube furnace set to 0
5/18/2012	6:57:17 PM	Helium valve closed
5/18/2012	6:57:17 PM	H2 valve closed
5/18/2012	6:57:17 PM	BCl3 valve closed
5/18/2012	6:57:17 PM	PH3 valve closed
5/18/2012	6:57:17 PM	SiCl4 pre valve closed
5/18/2012	6:57:17 PM	SiCl4 post valve closed
5/18/2012	6:57:17 PM	Bypass valve closed
5/18/2012	6:57:17 PM	Bubbler valve closed
5/18/2012	6:57:17 PM	Main Vac valve opened
5/18/2012	6:57:17 PM	Helium MFC set to  0.000000
5/18/2012	6:57:17 PM	H2 MFC set to  0.000000
5/18/2012	6:57:17 PM	BCl3 MFC set to  0.000000
5/18/2012	6:57:17 PM	PH3 MFC set to  0.000000
5/18/2012	6:57:17 PM	SiCl4 MFC set to  0.000000
5/18/2012	6:57:17 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	6:57:17 PM	Tube furnace set to 0
5/18/2012	6:57:18 PM	Run finished at 6:57 PM
5/18/2012	6:57:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2012	7:22:10 PM	Helium MFC set to  10.000000
5/18/2012	7:22:11 PM	Helium valve opened
5/18/2012	7:22:26 PM	Helium valve closed
5/18/2012	7:45:38 PM	Main Vac valve closed
5/18/2012	7:46:05 PM	Main Vac valve opened
5/18/2012	7:47:36 PM	Recipe started at 7:47 PM
5/18/2012	7:47:36 PM	Helium valve closed
5/18/2012	7:47:36 PM	H2 valve closed
5/18/2012	7:47:36 PM	BCl3 valve closed
5/18/2012	7:47:36 PM	PH3 valve closed
5/18/2012	7:47:36 PM	SiCl4 pre valve closed
5/18/2012	7:47:36 PM	SiCl4 post valve closed
5/18/2012	7:47:36 PM	Bypass valve closed
5/18/2012	7:47:36 PM	Bubbler valve closed
5/18/2012	7:47:36 PM	Main Vac valve opened
5/18/2012	7:47:36 PM	Helium MFC set to  0.000000
5/18/2012	7:47:36 PM	H2 MFC set to  0.000000
5/18/2012	7:47:36 PM	BCl3 MFC set to  0.000000
5/18/2012	7:47:36 PM	PH3 MFC set to  0.000000
5/18/2012	7:47:36 PM	SiCl4 MFC set to  0.000000
5/18/2012	7:47:36 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	7:47:36 PM	Tube furnace set to 0
5/18/2012	7:47:50 PM	Helium valve closed
5/18/2012	7:47:50 PM	H2 valve closed
5/18/2012	7:47:50 PM	BCl3 valve closed
5/18/2012	7:47:50 PM	PH3 valve closed
5/18/2012	7:47:50 PM	SiCl4 pre valve closed
5/18/2012	7:47:50 PM	SiCl4 post valve closed
5/18/2012	7:47:50 PM	Main Vac valve closed
5/18/2012	7:47:50 PM	Bypass valve closed
5/18/2012	7:47:50 PM	Bubbler valve closed
5/18/2012	7:47:50 PM	Helium MFC set to  0.000000
5/18/2012	7:47:50 PM	H2 MFC set to  0.000000
5/18/2012	7:47:50 PM	BCl3 MFC set to  0.000000
5/18/2012	7:47:50 PM	PH3 MFC set to  0.000000
5/18/2012	7:47:50 PM	SiCl4 MFC set to  0.000000
5/18/2012	7:47:50 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	7:47:50 PM	Tube furnace set to 0
5/18/2012	7:47:53 PM	Helium valve closed
5/18/2012	7:47:53 PM	BCl3 valve closed
5/18/2012	7:47:53 PM	PH3 valve closed
5/18/2012	7:47:53 PM	SiCl4 pre valve closed
5/18/2012	7:47:53 PM	SiCl4 post valve closed
5/18/2012	7:47:53 PM	Main Vac valve closed
5/18/2012	7:47:53 PM	Bypass valve closed
5/18/2012	7:47:53 PM	Bubbler valve closed
5/18/2012	7:47:53 PM	H2 valve opened
5/18/2012	7:47:53 PM	Helium MFC set to  0.000000
5/18/2012	7:47:53 PM	H2 MFC set to  500.000000
5/18/2012	7:47:53 PM	BCl3 MFC set to  0.000000
5/18/2012	7:47:53 PM	PH3 MFC set to  0.000000
5/18/2012	7:47:53 PM	SiCl4 MFC set to  0.000000
5/18/2012	7:47:53 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	7:47:53 PM	Tube furnace set to 0
5/18/2012	7:49:09 PM	Helium valve closed
5/18/2012	7:49:09 PM	BCl3 valve closed
5/18/2012	7:49:09 PM	PH3 valve closed
5/18/2012	7:49:09 PM	SiCl4 pre valve closed
5/18/2012	7:49:09 PM	SiCl4 post valve closed
5/18/2012	7:49:09 PM	Main Vac valve closed
5/18/2012	7:49:09 PM	Bypass valve closed
5/18/2012	7:49:09 PM	H2 valve opened
5/18/2012	7:49:09 PM	Bubbler valve opened
5/18/2012	7:49:09 PM	Helium MFC set to  0.000000
5/18/2012	7:49:09 PM	H2 MFC set to  500.000000
5/18/2012	7:49:09 PM	BCl3 MFC set to  0.000000
5/18/2012	7:49:09 PM	PH3 MFC set to  0.000000
5/18/2012	7:49:09 PM	SiCl4 MFC set to  0.000000
5/18/2012	7:49:09 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	7:49:09 PM	Tube furnace set to 0
5/18/2012	7:49:10 PM	Helium valve closed
5/18/2012	7:49:10 PM	BCl3 valve closed
5/18/2012	7:49:10 PM	PH3 valve closed
5/18/2012	7:49:10 PM	SiCl4 pre valve closed
5/18/2012	7:49:10 PM	SiCl4 post valve closed
5/18/2012	7:49:10 PM	Main Vac valve closed
5/18/2012	7:49:10 PM	Bypass valve closed
5/18/2012	7:49:10 PM	H2 valve opened
5/18/2012	7:49:10 PM	Bubbler valve opened
5/18/2012	7:49:10 PM	Helium MFC set to  0.000000
5/18/2012	7:49:10 PM	H2 MFC set to  500.000000
5/18/2012	7:49:10 PM	BCl3 MFC set to  0.000000
5/18/2012	7:49:10 PM	PH3 MFC set to  0.000000
5/18/2012	7:49:10 PM	SiCl4 MFC set to  0.000000
5/18/2012	7:49:10 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	7:49:10 PM	Tube furnace set to 1000
5/18/2012	8:09:10 PM	Helium valve closed
5/18/2012	8:09:10 PM	BCl3 valve closed
5/18/2012	8:09:10 PM	PH3 valve closed
5/18/2012	8:09:10 PM	Main Vac valve closed
5/18/2012	8:09:10 PM	Bypass valve closed
5/18/2012	8:09:10 PM	H2 valve opened
5/18/2012	8:09:10 PM	SiCl4 pre valve opened
5/18/2012	8:09:10 PM	SiCl4 post valve opened
5/18/2012	8:09:10 PM	Bubbler valve opened
5/18/2012	8:09:10 PM	Helium MFC set to  0.000000
5/18/2012	8:09:10 PM	H2 MFC set to  500.000000
5/18/2012	8:09:10 PM	BCl3 MFC set to  0.000000
5/18/2012	8:09:10 PM	PH3 MFC set to  0.000000
5/18/2012	8:09:10 PM	SiCl4 MFC set to  50.000000
5/18/2012	8:09:10 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	8:09:10 PM	Tube furnace set to 1000
5/18/2012	8:34:10 PM	Helium valve closed
5/18/2012	8:34:10 PM	BCl3 valve closed
5/18/2012	8:34:10 PM	PH3 valve closed
5/18/2012	8:34:11 PM	SiCl4 pre valve closed
5/18/2012	8:34:11 PM	SiCl4 post valve closed
5/18/2012	8:34:11 PM	Main Vac valve closed
5/18/2012	8:34:11 PM	Bypass valve closed
5/18/2012	8:34:11 PM	H2 valve opened
5/18/2012	8:34:11 PM	Bubbler valve opened
5/18/2012	8:34:11 PM	Helium MFC set to  0.000000
5/18/2012	8:34:11 PM	H2 MFC set to  500.000000
5/18/2012	8:34:11 PM	BCl3 MFC set to  0.000000
5/18/2012	8:34:11 PM	PH3 MFC set to  0.000000
5/18/2012	8:34:11 PM	SiCl4 MFC set to  0.000000
5/18/2012	8:34:11 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	8:34:11 PM	Tube furnace set to 750
5/18/2012	8:49:11 PM	H2 valve closed
5/18/2012	8:49:11 PM	BCl3 valve closed
5/18/2012	8:49:11 PM	PH3 valve closed
5/18/2012	8:49:11 PM	SiCl4 pre valve closed
5/18/2012	8:49:11 PM	SiCl4 post valve closed
5/18/2012	8:49:11 PM	Main Vac valve closed
5/18/2012	8:49:11 PM	Bypass valve closed
5/18/2012	8:49:11 PM	Helium valve opened
5/18/2012	8:49:11 PM	Bubbler valve opened
5/18/2012	8:49:11 PM	Helium MFC set to  500.000000
5/18/2012	8:49:11 PM	H2 MFC set to  0.000000
5/18/2012	8:49:11 PM	BCl3 MFC set to  0.000000
5/18/2012	8:49:11 PM	PH3 MFC set to  0.000000
5/18/2012	8:49:11 PM	SiCl4 MFC set to  0.000000
5/18/2012	8:49:11 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	8:49:11 PM	Tube furnace set to 0
5/18/2012	9:09:33 PM	Run aborted at 9:09 PM
5/18/2012	9:09:33 PM	Helium valve closed
5/18/2012	9:09:33 PM	H2 valve closed
5/18/2012	9:09:33 PM	BCl3 valve closed
5/18/2012	9:09:33 PM	PH3 valve closed
5/18/2012	9:09:33 PM	SiCl4 pre valve closed
5/18/2012	9:09:33 PM	SiCl4 post valve closed
5/18/2012	9:09:33 PM	Bypass valve closed
5/18/2012	9:09:33 PM	Main Vac valve closed
5/18/2012	9:09:33 PM	Bubbler valve closed
5/18/2012	9:09:33 PM	Helium MFC set to  0.000000
5/18/2012	9:09:33 PM	H2 MFC set to  0.000000
5/18/2012	9:09:33 PM	BCl3 MFC set to  0.000000
5/18/2012	9:09:33 PM	PH3 MFC set to  0.000000
5/18/2012	9:09:33 PM	SiCl4 MFC set to  0.000000
5/18/2012	9:09:33 PM	Tube furnace set to 0
5/18/2012	9:12:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2012	9:12:40 PM	Recipe started at 9:12 PM
5/18/2012	9:12:40 PM	Helium valve closed
5/18/2012	9:12:40 PM	H2 valve closed
5/18/2012	9:12:40 PM	BCl3 valve closed
5/18/2012	9:12:40 PM	PH3 valve closed
5/18/2012	9:12:40 PM	SiCl4 pre valve closed
5/18/2012	9:12:40 PM	SiCl4 post valve closed
5/18/2012	9:12:40 PM	Main Vac valve closed
5/18/2012	9:12:40 PM	Bubbler valve closed
5/18/2012	9:12:40 PM	Bypass valve opened
5/18/2012	9:12:40 PM	Helium MFC set to  0.000000
5/18/2012	9:12:40 PM	H2 MFC set to  0.000000
5/18/2012	9:12:40 PM	BCl3 MFC set to  0.000000
5/18/2012	9:12:40 PM	PH3 MFC set to  0.000000
5/18/2012	9:12:40 PM	SiCl4 MFC set to  0.000000
5/18/2012	9:12:40 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	9:12:40 PM	Tube furnace set to 0
5/18/2012	9:13:46 PM	Helium valve closed
5/18/2012	9:13:46 PM	H2 valve closed
5/18/2012	9:13:46 PM	BCl3 valve closed
5/18/2012	9:13:46 PM	PH3 valve closed
5/18/2012	9:13:46 PM	SiCl4 pre valve closed
5/18/2012	9:13:46 PM	SiCl4 post valve closed
5/18/2012	9:13:46 PM	Main Vac valve closed
5/18/2012	9:13:46 PM	Bubbler valve closed
5/18/2012	9:13:46 PM	Bypass valve opened
5/18/2012	9:13:46 PM	Helium MFC set to  0.000000
5/18/2012	9:13:46 PM	H2 MFC set to  0.000000
5/18/2012	9:13:46 PM	BCl3 MFC set to  0.000000
5/18/2012	9:13:46 PM	PH3 MFC set to  0.000000
5/18/2012	9:13:46 PM	SiCl4 MFC set to  0.000000
5/18/2012	9:13:46 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	9:13:46 PM	Tube furnace set to 0
5/18/2012	9:14:46 PM	Helium valve closed
5/18/2012	9:14:46 PM	H2 valve closed
5/18/2012	9:14:46 PM	BCl3 valve closed
5/18/2012	9:14:46 PM	PH3 valve closed
5/18/2012	9:14:46 PM	SiCl4 pre valve closed
5/18/2012	9:14:46 PM	SiCl4 post valve closed
5/18/2012	9:14:46 PM	Bypass valve closed
5/18/2012	9:14:46 PM	Bubbler valve closed
5/18/2012	9:14:46 PM	Main Vac valve opened
5/18/2012	9:14:46 PM	Helium MFC set to  0.000000
5/18/2012	9:14:46 PM	H2 MFC set to  0.000000
5/18/2012	9:14:46 PM	BCl3 MFC set to  0.000000
5/18/2012	9:14:46 PM	PH3 MFC set to  0.000000
5/18/2012	9:14:46 PM	SiCl4 MFC set to  0.000000
5/18/2012	9:14:46 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	9:14:46 PM	Tube furnace set to 0
5/18/2012	9:14:47 PM	Run finished at 9:14 PM
5/18/2012	9:14:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2012	10:40:44 PM	Main Vac valve closed
5/18/2012	10:40:55 PM	Main Vac valve opened
5/18/2012	10:41:27 PM	Main Vac valve closed
5/18/2012	10:41:51 PM	Main Vac valve opened
5/18/2012	10:44:31 PM	Recipe started at 10:44 PM
5/18/2012	10:44:31 PM	Helium valve closed
5/18/2012	10:44:31 PM	H2 valve closed
5/18/2012	10:44:31 PM	BCl3 valve closed
5/18/2012	10:44:31 PM	PH3 valve closed
5/18/2012	10:44:31 PM	SiCl4 pre valve closed
5/18/2012	10:44:31 PM	SiCl4 post valve closed
5/18/2012	10:44:31 PM	Main Vac valve closed
5/18/2012	10:44:31 PM	Bypass valve closed
5/18/2012	10:44:31 PM	Bubbler valve closed
5/18/2012	10:44:31 PM	Helium MFC set to  0.000000
5/18/2012	10:44:31 PM	H2 MFC set to  0.000000
5/18/2012	10:44:31 PM	BCl3 MFC set to  0.000000
5/18/2012	10:44:31 PM	PH3 MFC set to  0.000000
5/18/2012	10:44:31 PM	SiCl4 MFC set to  0.000000
5/18/2012	10:44:31 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	10:44:31 PM	Tube furnace set to 0
5/18/2012	10:44:34 PM	Helium valve closed
5/18/2012	10:44:34 PM	BCl3 valve closed
5/18/2012	10:44:34 PM	PH3 valve closed
5/18/2012	10:44:34 PM	SiCl4 pre valve closed
5/18/2012	10:44:34 PM	SiCl4 post valve closed
5/18/2012	10:44:34 PM	Main Vac valve closed
5/18/2012	10:44:34 PM	Bypass valve closed
5/18/2012	10:44:34 PM	Bubbler valve closed
5/18/2012	10:44:34 PM	H2 valve opened
5/18/2012	10:44:34 PM	Helium MFC set to  0.000000
5/18/2012	10:44:34 PM	H2 MFC set to  500.000000
5/18/2012	10:44:34 PM	BCl3 MFC set to  0.000000
5/18/2012	10:44:34 PM	PH3 MFC set to  0.000000
5/18/2012	10:44:34 PM	SiCl4 MFC set to  0.000000
5/18/2012	10:44:34 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	10:44:34 PM	Tube furnace set to 0
5/18/2012	10:45:50 PM	Helium valve closed
5/18/2012	10:45:50 PM	BCl3 valve closed
5/18/2012	10:45:50 PM	PH3 valve closed
5/18/2012	10:45:50 PM	SiCl4 pre valve closed
5/18/2012	10:45:50 PM	SiCl4 post valve closed
5/18/2012	10:45:50 PM	Main Vac valve closed
5/18/2012	10:45:50 PM	Bypass valve closed
5/18/2012	10:45:50 PM	H2 valve opened
5/18/2012	10:45:50 PM	Bubbler valve opened
5/18/2012	10:45:50 PM	Helium MFC set to  0.000000
5/18/2012	10:45:50 PM	H2 MFC set to  500.000000
5/18/2012	10:45:50 PM	BCl3 MFC set to  0.000000
5/18/2012	10:45:50 PM	PH3 MFC set to  0.000000
5/18/2012	10:45:50 PM	SiCl4 MFC set to  0.000000
5/18/2012	10:45:50 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	10:45:51 PM	Tube furnace set to 0
5/18/2012	10:45:52 PM	Helium valve closed
5/18/2012	10:45:52 PM	BCl3 valve closed
5/18/2012	10:45:52 PM	PH3 valve closed
5/18/2012	10:45:52 PM	SiCl4 pre valve closed
5/18/2012	10:45:52 PM	SiCl4 post valve closed
5/18/2012	10:45:52 PM	Main Vac valve closed
5/18/2012	10:45:52 PM	Bypass valve closed
5/18/2012	10:45:52 PM	H2 valve opened
5/18/2012	10:45:52 PM	Bubbler valve opened
5/18/2012	10:45:52 PM	Helium MFC set to  0.000000
5/18/2012	10:45:52 PM	H2 MFC set to  500.000000
5/18/2012	10:45:52 PM	BCl3 MFC set to  0.000000
5/18/2012	10:45:52 PM	PH3 MFC set to  0.000000
5/18/2012	10:45:52 PM	SiCl4 MFC set to  0.000000
5/18/2012	10:45:52 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	10:45:52 PM	Tube furnace set to 1000
5/18/2012	11:10:52 PM	Helium valve closed
5/18/2012	11:10:52 PM	BCl3 valve closed
5/18/2012	11:10:52 PM	PH3 valve closed
5/18/2012	11:10:52 PM	Main Vac valve closed
5/18/2012	11:10:52 PM	Bypass valve closed
5/18/2012	11:10:52 PM	H2 valve opened
5/18/2012	11:10:52 PM	SiCl4 pre valve opened
5/18/2012	11:10:52 PM	SiCl4 post valve opened
5/18/2012	11:10:52 PM	Bubbler valve opened
5/18/2012	11:10:52 PM	Helium MFC set to  0.000000
5/18/2012	11:10:52 PM	H2 MFC set to  500.000000
5/18/2012	11:10:52 PM	BCl3 MFC set to  0.000000
5/18/2012	11:10:52 PM	PH3 MFC set to  0.000000
5/18/2012	11:10:52 PM	SiCl4 MFC set to  50.000000
5/18/2012	11:10:52 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	11:10:52 PM	Tube furnace set to 1000
5/18/2012	11:30:52 PM	Helium valve closed
5/18/2012	11:30:52 PM	BCl3 valve closed
5/18/2012	11:30:52 PM	PH3 valve closed
5/18/2012	11:30:52 PM	SiCl4 pre valve closed
5/18/2012	11:30:52 PM	SiCl4 post valve closed
5/18/2012	11:30:52 PM	Main Vac valve closed
5/18/2012	11:30:52 PM	Bypass valve closed
5/18/2012	11:30:52 PM	H2 valve opened
5/18/2012	11:30:52 PM	Bubbler valve opened
5/18/2012	11:30:52 PM	Helium MFC set to  0.000000
5/18/2012	11:30:52 PM	H2 MFC set to  500.000000
5/18/2012	11:30:52 PM	BCl3 MFC set to  0.000000
5/18/2012	11:30:52 PM	PH3 MFC set to  0.000000
5/18/2012	11:30:52 PM	SiCl4 MFC set to  0.000000
5/18/2012	11:30:52 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	11:30:52 PM	Tube furnace set to 750
5/18/2012	11:45:52 PM	H2 valve closed
5/18/2012	11:45:52 PM	BCl3 valve closed
5/18/2012	11:45:52 PM	PH3 valve closed
5/18/2012	11:45:52 PM	SiCl4 pre valve closed
5/18/2012	11:45:52 PM	SiCl4 post valve closed
5/18/2012	11:45:52 PM	Main Vac valve closed
5/18/2012	11:45:52 PM	Bypass valve closed
5/18/2012	11:45:52 PM	Helium valve opened
5/18/2012	11:45:52 PM	Bubbler valve opened
5/18/2012	11:45:52 PM	Helium MFC set to  500.000000
5/18/2012	11:45:52 PM	H2 MFC set to  0.000000
5/18/2012	11:45:52 PM	BCl3 MFC set to  0.000000
5/18/2012	11:45:52 PM	PH3 MFC set to  0.000000
5/18/2012	11:45:52 PM	SiCl4 MFC set to  0.000000
5/18/2012	11:45:52 PM	Bypass solenoid MFC set to  0.000000
5/18/2012	11:45:52 PM	Tube furnace set to 0
